HITACHI S-4500 掃描電子顯微鏡
HITACHI S-4500 TYPE II COLD FIELD EMISSION SEM SYSTEM consisting of:
Performance:
- Secondary electron image resolution: 1.5 nm at 15 kVA
- Magnification: 20x – 500KX
- Objective aperture: 4 position externally selectable
- Stigmator: Octopole electromagnetic
- Scanning Coil: 2-stage electromagnetic
Electron Optics:
- Electron Gun: Cold field emission source
- Lens Type: Electromagnetic
- Objective Aperture: 4 position externally selectable
Sample Chamber:
- Size: Type II
- Airlock: Pre-pumped, max sample size: 150mm diameter
- Stage Motion: 5-axis manual; X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 Deg continuous
- Deben Stage Controller Option Included for Motorized Stage Control (X, Y & Rotation)
Display System:
- Image Display: Dual 12” Monitors
- Scanning Mode: Normal, reduced area, line scan, photo scan, spot position, split screen
- Scanning Speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame
- Signal Processing: Real-time processing, auto-brightness and contrast control, dynamic stigmator, autofocus
- Frame averaging, frame integration, contrast conversion
Vacuum System:
- Full automatic operation with pneumatic valve control
- Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber
- Seiko Seiki Turbo Pump and Controller
- Vacuum Pump
Option Included with this System:
- Chamber Scope
- Turbo Pump & Controller
- Deben Stage Controller
