HITACHI S-9220 掃描電子顯微鏡
Configurations:
Magnification: 1000 to 300000x
Measurement range: 0.1-2um
Measurement repeatability: 3nm
Resolution: 3nm
Throughput (20 points continuous): 11 wafers/hour
Stage stop accuracy: ±5.0 um
Resolution: Secondary electron image 3nm
Reproducible precision of measurement: 3δ ≦ 0.005μm
Reproducible precision of the position: Within in ± 5 μm
Prealignment precision of the loader: Within ± 10 μm
聯系人：黃文俊
地址：深圳市龍華新區人民南路萊蒙水榭春天7棟鳳凰苑24C/24D
郵編：518131
電話：13928415151
傳真：0755-83176509
公司網址：http://www.itestworld.com
掃描此二維碼即可訪問該空間手機版
