Tel ACT-8 涂布機

The CLEAN TRACK ACT 12 and ACT 8 are coater/developers that support 300-mm/200-mm wafer processing. They enable stable, high-level processing and smooth development from R&D through to mass production. During in-line processing, the footprint can be reduced to a size equivalent to existing systems, while high-speed transport accomplishes a high throughput. Uptime has been improved by increasing the reliability of each component and simplifying maintenance. In addition, a chemical filter and a high-accuracy oven are used to support DUV processing.

Features

Supports 120 WPH ( wafer per hour ) throughput

Supports 300-mm (200-mm) factory automation

In-line metrology options

Performs recipe management, reliability monitoring, and data analysis (options) remotely from a group controller.

Applications

Dry lithography process (ArF, KrF, i-line)